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Rapid Thermal Processing for Future Semiconductor Devices

By  H. Fukuda

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In Stock (449)

£ 144.45

Description

A collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. It covers the following areas such as advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe and hetero-structure.

Book Details
EAN:
9780444513397
Binding:
Paperback / softback
Dimensions(mm):
921 x 614
Publication Date:
2003-04-02
Publication Country:
United Kingdom