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Chemical-Mechanical Polishing – Fundamentals and Challenges: Volume 566

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In Stock (787)

£ 38.40

Description

This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included.

Book Details
EAN:
9781558994737
Binding:
Hardback
Dimensions(mm):
234 x 157 x 23
Publication Date:
2000-02-10
Series:
Publication Country:
United States