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Handbook of Chemical Vapor Deposition
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£ 229.50
Description
Offers an understanding of the advances in the Chemical Vapor Deposition (CVD) process. This book features data on both Plasma CVD and metallo-organic CVD processes. It also explains growing importance of CVD in production of semiconductor and related applications.
Book Details
Classification:
EAN:
9780815514329
Binding:
Hardback
Dimensions(mm):
237 x 164 x 40
Publication Date:
1999-09-01
Publisher:
Publication Country:
United States