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Handbook of VLSI Microlithography

Usually dispatched within 3 - 5 business days.

In Stock (866)

£ 59.39

Description

Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

Book Details
EAN:
9780815512813
Binding:
Hardback
Dimensions(mm):
229 x 152
Publication Date:
2010-07-19
Publication Country:
United States