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Plasma Processes for Semiconductor Fabrication
Usually dispatched within 3 - 5 business days.
£ 86.40
Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.